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2009-105 - Technique for Integrating a Vertical Parallel Plate Capacitive Chemical Sensor
2009-105 - Technique for Integrating a Vertical Parallel Plate Capacitive Chemical Sensor
Other Information
Capacitive chemical sensors rely on small changes in capacitance of a sensitive material layer when gas particles are absorbed. A vertical electric field structure consisting of a sensitive layer sandwiched between two parallel plates gives...
Published: 5/6/2026
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Updated: 2/6/2026
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Inventor(s): Nathan Lazarus, Gary Fedder
Keywords(s):
Category(s): Technology
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